2025骞村崐灏�(d菐o)楂旀潗鏂欒妤�(y猫)楂樼浜烘墠闇�姹傝垏钖叕鍒嗘瀽
鐧�(f膩)甯冩檪(sh铆)闁擄細2025-10-14
锛堢敱灏氳尝閬�(d谩)鐛甸牠鍏徃娆�(qu谩n)濞佺櫦(f膩)甯冿級
涓�銆佽妤�(y猫)鐖嗙櫦(f膩)鑸囦汉鎵嶉渶姹傝儗鏅�
鍏ㄧ悆鍗婂皫(d菐o)楂旂敘(ch菐n)妤�(y猫)閺堥噸妲�(g貌u)鑳屾櫙涓�锛屾潗鏂欓牁(l菒ng)鍩熸垚鐐洪棞(gu膩n)閸电獊鐮撮粸(di菐n)锛�
• 鎶�琛�(sh霉)鍗¤剸瀛愰牁(l菒ng)鍩燂細鍏夊埢鑶�銆佸ぇ纭呯墖銆侀珮绱旈澏鏉愮瓑鍦�(gu贸)鐢�(ch菐n)鍖栫巼涓嶈冻20%锛�
• 璩囨湰鎶曞叆婵�澧烇細2023骞翠腑鍦�(gu贸)鍗婂皫(d菐o)楂旀潗鏂欓牁(l菒ng)鍩熻瀺璩囪秴300鍎勫厓锛�
• 鏀跨瓥鍔犵⒓锛氬湅(gu贸)瀹跺ぇ鍩洪噾浜屾湡閲嶉粸(di菐n)甯冨眬鏉愭枡鐠�(hu谩n)绡�(ji茅)銆�
浜�銆佷簲澶х穵缂哄礂浣嶈垏钖叕灏�(du矛)妯�(bi膩o)
1. 鍗婂皫(d菐o)楂旀潗鏂欓甯瀛�(xu茅)瀹�
o 鏍稿績鑳藉姏锛氫富灏�(d菐o)3nm浠ヤ笅鍒剁▼閰嶅鏉愭枡鐮旂櫦(f膩)锛堝EUV鍏夊埢鑶狅級锛�
o 浜烘墠渚�(l谩i)婧愶細鑷�(t谩i)绌嶉浕銆佷俊瓒婂寲瀛�(xu茅)銆侀粯鍏嬬瓑鍦�(gu贸)闅涘ぇ寤犺彲瑁斿皥(zhu膩n)瀹讹紱
o 钖叕鑼冨湇锛氬勾钖� 180-400钀�(w脿n)鍏冿紙鍚妧琛�(sh霉)鍏ヨ偂锛�銆�
2. 鏅跺湏绱�(j铆)鏉愭枡宸ヨ棟灏�(zhu膩n)瀹�
o 闂�(gu膩n)閸垫寚妯�(bi膩o)锛�12鑻卞纭呯墖缂洪櫡鐜囨帶鍒讹紲0.1鍊�(g猫)/cm²锛�
o 甯傚牬(ch菐ng)婧㈠児(ji脿)锛氭湁娴峰闋儴鏅跺湏寤犵稉(j墨ng)椹�(y脿n)鑰呰柂閰仈(d谩)琛屾キ(y猫)鍧囧��2鍊�锛�
o 鍏稿瀷钖叕锛氬勾钖� 120-250钀�(w脿n)鍏冦��
3. 鍖栧悎鐗╁崐灏�(d菐o)楂旂爺鐧�(f膩)绺界洠(ji膩n)
o 鍓嶆部鏂瑰悜锛�SiC/GaN瑗簳鍒跺倷鎶�琛�(sh霉)锛�
o 浜烘墠鐖�(zh膿ng)濂埌(zh脿n)锛氭柊鑳芥簮杌�(ch膿)浼佽垏绗笁浠ｅ崐灏�(d菐o)楂斿垵鍓�(chu脿ng)浼佹キ(y猫)婵�鐑堢(j矛ng)閫愶紱
o 钖叕绲�(ji茅)妲�(g貌u)锛氬簳钖�+閲忕敘(ch菐n)鎻愭垚锛堢附鍖呭彲閬�(d谩)300钀�(w脿n)+锛�銆�
4. 鏉愭枡琛ㄥ緛鑸囨娓�(c猫)灏�(zhu膩n)瀹�
o 鎶�琛�(sh霉)闁�(m茅n)妾伙細绮鹃��TEM/SIMS绛夊皷绔娓�(c猫)瑷�(sh猫)鍌�锛�
o 渚涢渶姣旓細鍚堟牸浜烘墠瀛橀噺涓嶈冻宕椾綅闇�姹傜殑1/10锛�
o 钖叕鍩烘簴(zh菙n)锛氬勾钖� 80-150钀�(w脿n)鍏�銆�
5. 鍦�(gu贸)鐢�(ch菐n)鍖栭爡(xi脿ng)鐩附宸�
o 鐗规畩鍍�(ji脿)鍊硷細鎴愬姛涓诲皫(d菐o)閬�(gu貌)鏉愭枡鍦�(gu贸)鐢�(ch菐n)鍖栨浛浠ｉ爡(xi脿ng)鐩叏绋嬶紱
o 婵�鍕�(l矛)妯″紡锛氶爡(xi脿ng)鐩埄娼�(r霉n)鍒嗘垚锛堟渶楂樺彲閬�(d谩)骞磋柂50%锛�锛�
o 钖叕鍗�(q奴)闁擄細骞磋柂 150-300钀�(w脿n)鍏冦��
涓�銆佷汉鎵嶇(j矛ng)鐖�(zh膿ng)涓夊ぇ鐝�(xi脿n)璞�
1. 鍦板煙鎬ц櫣鍚告晥鎳�(y墨ng)锛氶暦(zh菐ng)涓夎锛堜笂娴�/鍚堣偉锛夎柂璩囨瘮鍏�(n猫i)闄稿湴鍗�(q奴)楂�30-50%锛�
2. 璺ㄧ晫鐖�(zh膿ng)濂姞鍔囷細鍏変紡榫嶉牠浠ヨ偂娆�(qu谩n)婵�鍕�(l矛)鎼跺オ鍗婂皫(d菐o)楂旀潗鏂欎汉鎵嶏紱
3. 闅辨�ф祦鍕�(d貌ng)澹佸锛氳粛宸ョ浉闂�(gu膩n)鏉愭枡浜烘墠鍙椾繚瀵嗗崝(xi茅)璀伴檺鍒舵祦鍕�(d貌ng)鐜囦笉瓒�5%銆�
鍥�銆佷紒妤�(y猫)鐛佃仒绛栫暐寤鸿
• 绮炬簴(zh菙n)鐙欐搳锛氶�氶亷(gu貌)SEMICON绛夎妤�(y猫)灞曟渻(hu矛)寤虹珛浜烘墠搴�(k霉)锛�
• 鏌旀�у紩閫�(j矛n)锛氬皪(du矛)娴峰灏�(zhu膩n)瀹堕噰鐢�"闆欏熀鍦板伐浣滃埗"锛堝6鍊�(g猫)鏈堝湅(gu贸)鍏�(n猫i)+6鍊�(g猫)鏈堟捣澶栵級锛�
• 钖叕鍓�(chu脿ng)鏂帮細瑷�(sh猫)缃�"鎶�琛�(sh霉)閲岀▼纰戠崕(ji菐ng)閲�"锛堝鍏夊埢鑶犲垎杈ㄧ巼鎻愬崌鐛�(ji菐ng)鍕�(l矛)锛�銆�
灏氳尝閬�(d谩)灏�(zhu膩n)闋�(xi脿ng)鏈嶅嫏(w霉)锛氭垜鍊戝凡寤虹珛瑕嗚搵鍏ㄧ悆TOP20鍗婂皫(d菐o)楂旀潗鏂欎紒妤�(y猫)鐨勬牳蹇冧汉鎵嶅湴鍦�锛屽彲鎻愪緵锛�
1. 銆婄窗(x矛)鍒嗘潗鏂欓牁(l菒ng)鍩熻柂閰搴﹀牨(b脿o)鍛娿��
2. 绔�(j矛ng)妤�(y猫)浜烘墠娴佸嫊(d貌ng)闋�(y霉)璀﹀垎鏋�
3. 闂�(gu膩n)閸垫妧琛�(sh霉)鍦�(tu谩n)闅�(du矛)鏁村缓鍒剁嵉鑱樻柟妗�